Graduate School of
Science and Engineering

Surface processing for functional materials such as semiconductors, ceramics and optical materials is essential to achieve high-performance electronic/optical devices. However, owing to their high mechanical hardness and chemical stability, such materials are generally difficult to be processed by conventional surface machining method. In our research, novel surface preparation method are developed utilizing physical/chemical reactions occurred on the material surface. The physical/chemical reaction including electrochemical, tribo-chemical, and catalystenhanced chemical reaction are employed to remove material surface with an atomic/molecular level accuracy, and thus the ultra-precision machined surface can be obtained. Furthermore, functional particles such as multi-component magnetic particles, SPE (solid polymer electrolyte)-coated particles are also developed to polish or etch material surfaces with nano/micro accuracy. By developing new processing methods that offer superior efficiency and accuracy to the conventional machining method, we can contribute to a promotion of the energy-saving and environment-friendly society.