Researcher's Information
MEMS devices for technology of evaluation/observation
Micro Electro Mechanical Systems (MEMS) technology is one of the most prospective fields for applying the information equipment, industrial equipment, medical field, scientific field, and so on. Our research projects are basic researches for realizing the MEMS devices and micro- or nanometer structures. Characterization of MEMS materials is essential issues to ensure reliability of devices and requires new techniques to overcome difficulties that the target materials are very small.
We have developed new testing method to evaluate tensile strength and fatigue life for microscale and nanoscale specimens. We are preparing the test specimen in MEMS testing devices that you can see in figures. Then tests are performed in electron microscope to observe the aspect in large magnification view (left figure). We are also interested in development of micromachining to achieve a new miniaturized shape and structure. Now we are trying to create a new MEMS field by promoting our research.
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Tensile testing device for silicon
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Fatigue testing device for polymer material