Graduate School of
Science and Engineering

Our study focuses on the fabrication and investigation of advanced functional surfaces/interfaces through a combination of micromachining technology and mechanical–electrical thin films. Surface properties have higher impact on physical and chemical phenomena at the micro-scale than on those at the macro-scale. Functional surfaces/interfaces have a wide range of potential applications. The design and fabrication of topological surface structures based on micromachining and thin-film growth of advanced functional materials through thermal evaporation, reactive sputtering, and electroplating are studied to fabricate new functional surfaces/interfaces. For example, we are currently working on wettability for microliquid manipulation.