Graduate School of
Science and Engineering

Our research interest is in the integration of micro/nano scale devices utilizing their electrical and mechanical properties. MEMS (Microelectromechanical Systems) and NEMS (Nanoelectromechanical Systems) are key technologies to the development of tiny sensors and actuators for the coming IoT/ CPS (Internet of Things / Cyber-Physical Systems) era. Using MEMS/NEMS technology, we aim to realize seamless interaction between micro/nano devices, integrated circuits (e.g. CMOS-LSI) and nano-material properties, which contributes to maximizing the performance of chip-scale sensors, actuators and their integrated systems. Also, with the aid of informatics, we explore new smart applications employing such miniature electro-mechanical devices, enabling physical and digital worlds to be closely intertwined more than ever.